Radiant energy – Supported for nonsignalling objects of irradiation
Patent
1994-04-25
1994-12-20
Berman, Jack I.
Radiant energy
Supported for nonsignalling objects of irradiation
2504922, 279 3, 269 21, H01J 3720
Patent
active
053748298
ABSTRACT:
A wafer holding device of the vacuum attraction type includes a structural member having a protrusion for supporting a wafer and elastic members made of a material having an elasticity modulus smaller than that of the wafer and that of the structural member. The elastic members are distributed on a wafer attraction plane of the structural member.
REFERENCES:
patent: 4213698 (1980-07-01), Firtion et al.
patent: 4357006 (1982-11-01), Hayes
patent: 5324012 (1994-06-01), Aoyama
Patent Abstracts of Japan, vol. 9, No. 56 (Mar. 12, 1985).
Ebinuma Ryuichi
Hara Shin-ichi
Marumo Mitsuji
Sakamoto Eiji
Berman Jack I.
Canon Kabushiki Kaisha
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