Method for improving the operation of oscillating mode atomic fo

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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250306, 250307, 73105, G01B 734

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active

060084898

ABSTRACT:
The oscillation parameters of a probe of an atomic force microscope (AFM) typically vary over time. This variation can cause problems during either 1) scanning or measurement functions in which the probe's operative state is one in which oscillatory measurements are taken or 2) the process of bringing the tip to the sample to begin measurement, commonly referred to as engaging the probe, in which the probe's operative state is one in which the probe is about to move into its measuring position. These problems can be eliminated during either process by measuring changes in a parameter or parameters of probe oscillation, determining what changes are not due to probe-sample interaction, and correcting the oscillation parameters accordingly. This may be accomplished in two ways, the first with the probe out of intermittent contact with the sample, and the second during scanning. The first comprises placing the probe in a reference or free oscillation state in which the probe tip oscillates at a free oscillation amplitude A.sub.o, measuring A.sub.o and adjusting it if necessary, and then returning the probe to its operative state. The probe can be placed in its reference state by varying the spacing between the probe and the sample, by altering probe drive parameters, or by any other suitable technique. The second comprises measuring the phase of the probe oscillation during scanning and adjusting the phase to a desired range.

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