Projection type light exposure apparatus and light exposure meth

Details Projection type light exposure apparatus and light exposure meth Projection type light exposure apparatus and light exposure meth

1993-06-21

1994-10-18

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, 355 77, G03B 2742

Patent

active

053573110

ABSTRACT:
A projection type light exposure apparatus comprises, a mask having a fine pattern and at least one auxiliary pattern spaced from the fine pattern by a predetermined distance along an edge of the fine pattern, a projection optical system for projecting the fine pattern on the mask onto a photosensitive substrate, an illumination optical system for supplying an illumination light to the mask, and the illumination light being irradiated from at least one local area centered at a position eccentric from an optical axis of the illumination optical system in or a vicinity of a Fourier transform plane of the mask in the illumination optical system.

REFERENCES:
patent: 4668089 (1987-05-01), Oshida et al.
patent: 4869999 (1989-09-01), Fukuda et al.
patent: 4931830 (1990-06-01), Suwa et al.
patent: 4947413 (1990-08-01), Jewell et al.
patent: 5111240 (1992-05-01), Boettiger et al.
patent: 5119113 (1992-06-01), Prakash et al.
patent: 5144362 (1992-09-01), Kamon et al.

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