Gas laser

Oscillators – Molecular or particle resonant type

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H01S 106

Patent

active

043073514

ABSTRACT:
A gas laser for emitting ultraviolet laser light with a wave length of 248-249 nm, the gas mixture in the resonance chamber containing krypton, fluor or a fluor compound, and argon in such quantities that at room temperature the partial argon pressure exceeds 0.5 bar and the partial pressure of krypton and fluor or the fluor compound is smaller than 0.2 bar. The gas mixture in the resonance chamber also contains neon in such a quantity that its partial pressure at room temperature is at least equal to that of the argon.

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