CVD torch

Fluid sprinkling – spraying – and diffusing – With heating or cooling means for the system or system fluid – Heating means

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Details

239424, 239425, 2394275, B05B 316

Patent

active

048631027

ABSTRACT:
An improved torch for the mixing of oxidant and fuel gases external to the torch, for example for use in chemical vapor deposition processes, and its method of manufacture are disclosed. A first torch body portion is formed having a manifold cavity with one side open. A number of tubes extend from passages formed in a torch face plate through the first manifold cavity. A first liquid material (such as wax) is poured into the cavity, such that its upper surface defines the desired inside wall surface of the first manifold corresponding to the open side. This material is allowed to harden. A second liquid material (such as epoxy) is then poured over the first material, and hardens to form the remaining wall of the first manifold cavity and to seal the tubes to the torch body portion. The first material is then removed, providing a torch body portion having a manifold with tubes extending through it. A second manifold may then be assembled to the first torch body portion to provide connection to the tubes. In a particularly preferred embodiment, the first tip body portion may contain a further passageway for receiving a flute tube to define additional passageways for the supply of additional unmixed materials to the vicinity of the flame.

REFERENCES:
patent: 904243 (1908-11-01), Bennett
patent: 2868587 (1959-01-01), Hegmann
patent: 3171599 (1965-03-01), Rotolico
patent: 3204682 (1965-09-01), Teleshefsky
patent: 3617224 (1971-11-01), Tsekhovoi
patent: 4575609 (1986-03-01), Fassel et al.

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