Process for the fabrication of a vertical contact

Details Process for the fabrication of a vertical contact Process for the fabrication of a vertical contact

1987-03-13

1989-07-25

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

156643, 156648, 20419234, 20419237, 427 38, 427259, 427265, 427270, 437 56, 437 61, 437176, 437177, 437178, 437188, 437192, 437193, 437200, 437201, 437203, 437228, 437229, 437233, 437239, 437243, 437915, 437985, B05D 512

Patent

active

048512575

ABSTRACT:
A process for the formation of a compact vertical contact having reduced lateral space requirements yet compatible with highly planarized semiconductor manufacturing processes. The contact is made from a foundation region having a top surface to an overlying layer separated from the foundation region by a dielectric. The overlying layer can be contacted on its edge rather than on its top surface in order to reduce the lateral expanse of the contact.

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