Method of loading and unloading a furnace

Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

414182, 414183, B65G 2500

Patent

active

046361405

ABSTRACT:
A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.

REFERENCES:
patent: 3958740 (1976-05-01), Dixon
patent: 4008815 (1977-02-01), Fisk
patent: 4362977 (1982-12-01), Evans et al.
patent: 4420812 (1983-12-01), Ito et al.
patent: 4440538 (1984-04-01), Bowers
patent: 4468195 (1984-08-01), Sasaki et al.
"Industrial Robots: Getting Smarter All the Time" by Rich Merritt; Instruments & Control Systems, Jul. 1982.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of loading and unloading a furnace does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of loading and unloading a furnace, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of loading and unloading a furnace will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2353314

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.