Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1990-06-08
1992-04-14
Valentine, Donald R.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
252135, 25217414, 25217419, C25F 100, C11D 754
Patent
active
051045010
ABSTRACT:
An improved electrolytic cleaning method for stamper which comprises suspending a stamper and an opposite electrode plate in an electrolytic stamper cleaning solution as opposed to each other by an electrode jig, the opposite electrode plate and the electrode jig each being made of substantially the same material as that of the stamper, and applying a DC voltage between the stamper and the opposite electrode so that the former serves as an anode and the later serves as a cathode to perform electrolytic cleaning under agitation of the cleaning solution.
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Daicel Chemical Industries Ltd.
Valentine Donald R.
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