Piezoelectric device, actuator using the same, and ink-jet recor

Details Piezoelectric device, actuator using the same, and ink-jet recor Piezoelectric device, actuator using the same, and ink-jet recor

Filed on

1998-02-04

Date issued

2000-04-18

Examiner

Ramirez, Nestor

Patent Class

Electrical generator or motor structure

SubClass

Non-dynamoelectric

SubSubClass

Piezoelectric elements and devices

Other Related Categories

H01L 4104

Type

Patent

Status

active

Patent number

060519142

Description

ABSTRACT:
A piezoelectric device comprises: a lower electrode; a piezoelectric film formed on the lower electrode; and an upper electrode formed on the piezoelectric film, wherein a low dielectric material having a dielectric constant that is lower than the piezoelectric film is formed at grain boundary exposed regions of the piezoelectric film.

REFERENCES:
patent: 5265315 (1993-11-01), Hoisington et al.
patent: 5446484 (1995-08-01), Hoisington et al.
patent: 5500988 (1996-03-01), Moynihan et al.
patent: 5817532 (1998-10-01), Joo et al.
Jpn. J. Appl. Phys. vol. 34 (1995) pp. L1155-L1157 Part 2, No. 9A, Sep. 1, 1998 "Effect of Alkanolamines on the Microstructure and Dielectric Properties of Lead Zirconium Titanium Trioxide Thin Films Prepared from Modified Metal Alkoxides".

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