Piezoelectric vibrator and manufacturing method thereof

Details Piezoelectric vibrator and manufacturing method thereof Piezoelectric vibrator and manufacturing method thereof

1995-04-19

1996-08-20

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310344, 310346, 310369, H01L 4108

Patent

active

055481787

ABSTRACT:
A piezoelectric vibrator includes a thin quartz plate portion for generating vibrations, and non-contact electrodes for applying an alternating electric field. The electrodes are arranged on opposing sides of the thin quartz plate portion so as to not contact with the thin quartz plate portion. The electrodes may be formed on a supporter which can be bonded directly to the thin quartz plate. The electrodes may also be formed above the thin quartz plate and supported by the plate outside the thin quartz plate portion. The piezoelectric vibrator has a superior Q of resonance at high frequencies.

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