Flat scanning stage for scanned probe microscopy

Details Flat scanning stage for scanned probe microscopy Flat scanning stage for scanned probe microscopy

1995-11-29

1998-01-06

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310331, 310369, H01L 4108

Patent

active

057058784

ABSTRACT:
A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.

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