Standard for monitoring the calibration of an optical line width

Details Standard for monitoring the calibration of an optical line width Standard for monitoring the calibration of an optical line width

1986-07-18

1988-07-05

Evans, F. L.

Optics: measuring and testing

Standard

G01J 102

Patent

active

047550503

ABSTRACT:
According to the invention there is provided a standard for monitoring the calibration of optical line width measuring machines which includes an opaque sheet having two spaced apart slots. Preferably, the sheet material is a metal such as chromium deposited on a transparent substrate.

REFERENCES:
patent: 4055376 (1977-10-01), Daberko
Swyt, Solid State Technology, vol. 21, No. 1, Jan. 1978, pp. 34-42.

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