Piezoresistive force rebalance accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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Details

7351433, 7386261, 7351417, G01P 1512, G01P 15125

Patent

active

055961444

ABSTRACT:
A motion sensor is provided for sensing motion or acceleration of a body, such as an accelerometer for use in an on-board automotive safety control system or navigational system. The motion sensor is a piezoresistive motion sensor that operates in a closed loop force rebalance mode. As such, the motion sensor may be considered a hybrid of piezoresistive sensors and capacitive force rebalance sensors. The sensor achieves this novel combination through a mechanically-biased proof mass that enables-the use of a single electrode for maintaining the proof mass in a null position during the operation of the sensor.

REFERENCES:
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patent: 5163325 (1992-11-01), White et al.
patent: 5177331 (1993-01-01), Rich et al.
patent: 5233213 (1993-08-01), Marek
patent: 5391283 (1995-02-01), Shimada et al.

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