Micromachined peristaltic pump

Details Micromachined peristaltic pump Micromachined peristaltic pump

1995-12-13

1998-01-06

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

1566301, 1566571, 216 2, 216 33, B44C 122

Patent

active

057050180

ABSTRACT:
A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically conductive strips. An overlying flexible conductive membrane is applied over the channel and conductive strips with an insulating layer separating the conductive strips from the conductive membrane. Application of a sequential voltage to the series of strips pulls the membrane into the channel portion of each successive strip to achieve a pumping action. A particularly desirable arrangement employs a micromachined push-pull dual channel cavity employing two substrates with a single membrane sandwiched between them.

REFERENCES:
patent: 4794370 (1988-12-01), Simpson et al.
patent: 5380396 (1995-01-01), Shikida et al.
patent: 5585011 (1996-12-01), Saaki et al.
Preprint of "Design, Fabrication & Testing of a Miniature Peristaltic Membrane Pump," by James A. Folta et al., Apr. 1992, prepared for Proceedings of the IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, held Jun. 21-25, 1992.
"Design, Fabrication & Testing of a Miniature Peristaltic Membrane Pump," by James A. Folta et al., pp. 186-189, Apr. 1992, Lawrence Livermore National Laboratory, California.
"A Piezo-Electric Pump Driven by a Flexural Progressive Wave," pp. 110-113, by Shun-ichi Miyazaki et al., Seventh International Conference on Solid State Sensors and Actuators, held at Yokohama, Japan, on Jun. 7-10, 1993.
"A Novel Piezoelectric Valve-Less Fluid Pump," by Erik Stemme et al., 7th International Conference on Solid State Sensors & Actuators, pp. 110-113, Yokohama, Japan, Jun. 7-10, 1993.
"Performance Simulation of Microminiaturized Membrane Pumps," by R. Zengerle, et al., Fraunhofer Institute for Solid State Technology, Munich, Germany.
"Peristaltic Pumpting," by M.Y. Jaffrin et al., 1971, Department of Mechanical Engineering, Institute of Technology, Cambridge, Massachusetts.
"Piezoelectric Micropump with Three Valves Working Peristaltically," by Jan G. Smist, Sensors and Actuators (1990), pp. 203-206.
"A Micro Membrane Pump with Electrostatic Actuation," by R. Zengerle et al., Micro Electro Mechanical Systems '92, Travemunde, Germany, Feb. 4-7, 1992.
"Electrohydrodynamic Pumping and Flow Measurement," by A. Richter et al., pp. 271-276, Proceedings of the IEEE Micro Electro Mechanical Systems, Application of Micro Structure, Sensors, Actuators, Machines and Robots, Nara, Japan, Jan. 30-Feb. 2, 1992, New York, New York. U.S.A., IEEE 1991.
"Dialog Search Abstract," date Oct. 12, 1995, pp. 1-8.
"Dialog Search Abstract," date Oct., 1995.

Affiliated with

Also associated with

Rating

Micromachined peristaltic pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromachined peristaltic pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined peristaltic pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2325480