Surface inspecting device for detecting the position of foreign

Details Surface inspecting device for detecting the position of foreign Surface inspecting device for detecting the position of foreign

1987-07-23

1989-05-16

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250572, G01N 2188

Patent

active

048312746

ABSTRACT:
A surface inspecting device may be used to inspect the surface of a reticle having a central transparent portion, bearing a circuit pattern to be photoprinted on a semiconductor wafer, and a peripheral light-intercepting portion surrounding the central transparent portion. Particularly, the device is usable to inspect the presence/absence of dust or foreign particles which are adhered to the transparent portion of the reticle. The device is arranged to detect the position of such a foreign particle, if any, adhered to the transparent portion, while taking as a reference the boundary between the transparent portion and the light-intercepting portion of the reticle. This operation permits accurate detection of the position of the particle on the transparent portion of the reticle.

REFERENCES:
patent: 4218142 (1980-08-01), Kryger et al.
patent: 4247204 (1981-01-01), Merlen et al.
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4547895 (1985-10-01), Mita et al.

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