Polishing apparatus including cloth cartridge connected to turnt

Details Polishing apparatus including cloth cartridge connected to turnt Polishing apparatus including cloth cartridge connected to turnt

1995-10-18

1998-01-06

Morgan, Eileen P.

Abrading

Machine

Rotary tool

451 41, 451287, 451451, B24B 500

Patent

active

057048274

ABSTRACT:
A polishing apparatus includes a detachable light weight cloth cartridge which shows little deformation under uneven loading during a polishing operation. Either mechanical or non-mechanical fixation of the cloth cartridge to a turntable is achieved. Mechanical fixation involves attaching the cloth cartridge to the turntable at peripheral and center sections of the cloth cartridge. Non-mechanical fixation involves attaching the cloth cartridge to the turntable by a vacuum arrangement. The assembly of the cloth cartridge and the turntable not only produces excellent flatness on polished semiconductor wafers by maintaining a level polishing surface, but also improves the production yield by preventing breakage of wafers during the polishing process.

REFERENCES:
patent: 3968598 (1976-07-01), Ogawa
patent: 4365446 (1982-12-01), Manekata et al.
patent: 4527358 (1985-07-01), Day
patent: 5310455 (1994-05-01), Pasch et al.

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