Method of manufacturing CCD image sensor by use of recesses

Details Method of manufacturing CCD image sensor by use of recesses Method of manufacturing CCD image sensor by use of recesses

1995-07-26

1997-01-21

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437 2, 437228, H01L 21339

Patent

active

055959300

ABSTRACT:
A charge coupled device (CCD) image sensor formed by producing hemispheric recesses in a lower planarizing layer in places corresponding to photodiodes and filling the recesses to form a dye layer. The recesses filled with dye serve as a concave lenses, which has the overall effect of reducing the height of the CCD as measured from the micro-lenses down to the photodiodes. By properly controlling the refractivity of the micro-lenses (to which the light is incident) and that of the dye layer serving as the concave lens, the light incident to the photodiodes advances with respect to the photodiodes, thus reducing a smear phenomenon and improving sensitivity of the CCD.

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patent: 4450475 (1984-05-01), Ishikawa et al.
patent: 4481530 (1984-11-01), Wagensonner et al.
patent: 5132251 (1992-07-01), Kim et al.
patent: 5266501 (1993-11-01), Imai
patent: 5350490 (1994-09-01), Lee

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