Fishing – trapping – and vermin destroying
Patent
1996-01-16
1997-01-21
Tsai, Jey
Fishing, trapping, and vermin destroying
437 60, 437919, H01L 2170, H01L 2700
Patent
active
055959296
ABSTRACT:
A method and resultant structure, is described for fabricating a DRAM cell having a cup-shaped capacitor connected to a MOS transistor with source and drain regions. A cylindrical bottom portion of a storage electrode is connected to and extends up from the source region of the transistor. The storage electrode has a solid cup shaped top portion over the bottom portion. The method comprises forming an interlayer insulating film over the MOS transistor and forming a photoresist layer with an opening over the source. The interlayer film is isotropically etched through the opening to form a cup shaped cavity. Next, the interlayer is anisotropically etch through the same photoresist opening to form a contact opening exposing the source. A polysilicon layer is formed filling the contact hole and the cup shaped cavity thereby forming a cup shaped storage electrode, The interlayer film is then removed. A capacitor dielectric and a top electrode are formed over the storage electrode to complete the cup shaped capacitors.
REFERENCES:
patent: 5248628 (1993-09-01), Okabe et al.
patent: 5447882 (1995-09-01), Kim
patent: 5508223 (1996-04-01), Tseng
patent: 5536671 (1996-07-01), Park
Saile George O.
Stoffel William J.
Tsai Jey
Vanguard International Semiconductor Corporation
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