Three-dimensional microstructures and methods for making three-d

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements

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359618, 359622, 430394, 205 75, G02B 2710

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active

060184221

ABSTRACT:
Methods are disclosed for making microstructures. In one method, the resist layer is reversibly deformed during exposure. When the resist is flattened and developed after exposure, non-vertical features result that are not obtainable through other existing means. One application of this method is to make nested cones suitable for use as a highly efficient x-ray lens. In another disclosed method, "halftone" lithography is used to generate microstructures having features whose height may vary continuously. One application of this method is to make a novel telescope array, a thin film having telescopic magnification properties.

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