Light source unit, optical measurement apparatus and exposure ap

Optical: systems and elements – Optical frequency converter

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359332, G02F 135

Patent

active

060184132

ABSTRACT:
A laser light source unit generates second higher-harmonic waves or sum-frequency waves by using an external resonator. The light source unit has a wavelength converter which incorporates an external resonator. A modulator spatially modulates the output light from the converter, thereby removing speckle noise. An optical waveguide propagates the laser light from the modulator to a given optical apparatus. The wavelength converter, the modulator, and the optical waveguide are mechanically separated. Moreover, vibration isolating members are provided to inhibit vibrations. Thus, any change in the length of the resonator or the optical axis caused by external vibrations is prevented. Further, a speckle pattern generated in propagating through an optical fiber is eliminated.

REFERENCES:
patent: 5022732 (1991-06-01), Engan et al.
patent: 5274494 (1993-12-01), Rafanelli et al.
M. Oka et al., "1 W Continuous-Wave 266 NM Radiation from an all Solid-State Frequency Quadrupled ND: Yag Laser," ASSL Technical Digest 1993, pp. 374-376.
L. Liu et al., "Compact All-Solid-State Continuous-Wave 1.5 Watt Laser Source at 266 NM," The 55th Meeting of the Japan Society of Applied Physics 1994, Extended Abstracts No. 20P-ML-5, p. 1219.

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