Metal working – Piezoelectric device making
Patent
1984-09-13
1997-01-21
Jordan, Charles T.
Metal working
Piezoelectric device making
H01L 4122
Patent
active
055949797
ABSTRACT:
A pair of crystallographically matched piezoelectric substrates are sealed together to provide a package for a SAW device. A sealant material including a glass frit is deposited on a selected portion of a first one of the pair of substrates. The substrate having the sealant material is then heated to a temperature which is substantially below the glazing temperature of the sealant material to dry the sealant material. The substrate having the dried sealant material is heated a second time at a temperature just above the softening temperature of the glass frit to glaze the glass frit component with other components of the sealant material being driven from the glass frit during the heating cycles. The substrate having the glazed frit and the other remaining substrate are then mated together in a predetermined manner. While the substrates are held together by exerting a downward pressure on the two mated substrates, the mated substrates are heated in a vacuum to a temperature substantially above the softening temperature of the sealant material, but below the crystallographic transformation temperature of the material of the substrates. This last heating cycle is used to seal the mated pair of substrates and to provide the packaged SAW device.
REFERENCES:
patent: 3418710 (1968-12-01), Seidel et al.
patent: 4213104 (1980-07-01), Cullen et al.
patent: 4270105 (1981-05-01), Parker et al.
patent: 4296347 (1981-10-01), Weiruch
"SAW Resonator Frit-Bonded Pressure Transducer" by D. F. Weirauch et al, 1979 Ultrasonics Symposium.
"Long-Term Aging And Mechanical Stability Of 1.4 GHz SAW Oscillators" by M. Gilden et al, 1980 Ultrasonics Symposium.
Corning Material Information Bulletin, Aug., 1976, Code 7572, pp. 1-2.
Corning Material Information Bulletin, Jan. 5, 1978, Code 8463, pp. 1-3.
Corning Applications Information Bulletin, Feb. 1981, Code 7572, pp. 1-2.
Corning Product Information Bulletin, Feb., 1981, pp. 1-3.
"Stable Microwave SAW Oscillators For Aging Studies" by G. K. Montress et al, 1979 Ultrasonics Symposium.
"Design Of Stable SAW Oscillators Operating Above 1 GHz" by M. Gilden et al, 1978 Ultrasonics Symposium Proceedings.
Borchelt Earl F.
Parker Thomas E.
Hardoe John R.
Jordan Charles T.
Mofford Donald F.
Raytheon Company
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