Electrical method of making conductive paths in silicon

Details Electrical method of making conductive paths in silicon Electrical method of making conductive paths in silicon

1982-06-28

1985-08-13

Ozaki, George T.

Metal working

Method of mechanical manufacture

Assembling or joining

29584, 29585, 29591, 148 15, 148171, 148183, 148187, 204130, H01L 21326

Patent

active

045341001

ABSTRACT:
A method of forming an electrical conductive path between parallel surfaces of a substrate is disclosed wherein a pulsed voltage, non-current limited, power supply causes aluminum to electromigrate between at least two opposing points to form an alloy with silicon of the substrate. Electronic devices can be thus contacted through said conductive path and thus placed upon opposite sides of the substrate for purposes of packaging, shielding, etc.

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