Method for fabricating CCD image sensors

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437 3, 437 50, H01L 21339

Patent

active

055102859

ABSTRACT:
A method for fabricating a charge coupled device (CCD) image sensor including the steps of: forming a plurality of photoelectric conversion regions and a plurality of vertical charge coupled device (VCCD) regions by a selective injection of second conductivity-type ions into a first conductivity-type semiconductor substrate; forming a plurality of transfer gate electrodes over the plurality of VCCD regions for transmitting image signal charges in four phases after forming a gate insulation film on the entire surface; depositing a first insulation film on the entire surface, and forming light shielding metal thereon; forming a first metal layer by selective removal of the optical shielding metal over the plurality of photoelectric conversion regions and the plurality of VCCD regions; forming contact holes for exposing the transfer gate electrodes the same clock signals applied thereto within one VCCD region of the plurality of VCCD regions, after depositing a second insulation film on the entire surface; and forming a second metal layer by depositing optical shielding and conductive metal on the entire surface, and carrying out patterning leaving the metal only on the plurality of the VCCD regions.

REFERENCES:
patent: 4831426 (1989-05-01), Kimata et al.
patent: 4851890 (1989-07-01), Miyatake
patent: 5246875 (1993-09-01), Shinji et al.
patent: 5422285 (1995-06-01), Ishibe
Article entitled "A 2 Million Pixel FIT-CCD Image Sensor For HDTV Camera Systems" By M. Yamagishi, et al., published in IEEE Transactions on Electron Devices, vol. 38, No. 5, May 1991.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for fabricating CCD image sensors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating CCD image sensors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating CCD image sensors will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2308075

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.