Fishing – trapping – and vermin destroying
Patent
1995-03-31
1996-04-23
Chaudhari, Chandra
Fishing, trapping, and vermin destroying
437 3, 437 50, H01L 21339
Patent
active
055102859
ABSTRACT:
A method for fabricating a charge coupled device (CCD) image sensor including the steps of: forming a plurality of photoelectric conversion regions and a plurality of vertical charge coupled device (VCCD) regions by a selective injection of second conductivity-type ions into a first conductivity-type semiconductor substrate; forming a plurality of transfer gate electrodes over the plurality of VCCD regions for transmitting image signal charges in four phases after forming a gate insulation film on the entire surface; depositing a first insulation film on the entire surface, and forming light shielding metal thereon; forming a first metal layer by selective removal of the optical shielding metal over the plurality of photoelectric conversion regions and the plurality of VCCD regions; forming contact holes for exposing the transfer gate electrodes the same clock signals applied thereto within one VCCD region of the plurality of VCCD regions, after depositing a second insulation film on the entire surface; and forming a second metal layer by depositing optical shielding and conductive metal on the entire surface, and carrying out patterning leaving the metal only on the plurality of the VCCD regions.
REFERENCES:
patent: 4831426 (1989-05-01), Kimata et al.
patent: 4851890 (1989-07-01), Miyatake
patent: 5246875 (1993-09-01), Shinji et al.
patent: 5422285 (1995-06-01), Ishibe
Article entitled "A 2 Million Pixel FIT-CCD Image Sensor For HDTV Camera Systems" By M. Yamagishi, et al., published in IEEE Transactions on Electron Devices, vol. 38, No. 5, May 1991.
Chaudhari Chandra
LG Semicon Co. Ltd.
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