Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent
1994-08-23
1996-04-23
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
216 12, 216 42, 216 67, 427536, 427539, 427198, 427203, 427259, 427264, 427272, 427307, C23C 1402, B65D 608, B05D 136, B05D 132
Patent
active
055101569
ABSTRACT:
A method for forming sub-micron sized bumps on the bottom surface of a suspended microstructure or the top surface of the underlying layer in order to reduce contact area and sticking between the two layers without the need for sub-micron standard photolithography capabilities and the thus-formed microstructure. The process involves the deposition of latex spheres on the sacrificial layer which will later temporarily support the microstructure, shrinking the spheres, depositing aluminum over the spheres, dissolving the spheres to leave openings in the metal layer, etching the sacrificial layer through the openings, removing the remaining metal and depositing the microstructure material over the now textured top surface of the sacrificial layer.
REFERENCES:
patent: 3954466 (1976-05-01), Beatty et al.
patent: 3992212 (1976-11-01), Youtsey et al.
patent: 4272564 (1981-06-01), Grewe et al.
patent: 4284689 (1981-08-01), Craighead et al.
patent: 4407695 (1983-10-01), Deckman et al.
patent: 4497974 (1985-02-01), Deckman et al.
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4711128 (1987-12-01), Boura
patent: 4743662 (1988-05-01), Lipowitz
patent: 4801476 (1989-01-01), Dunsmuir et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5275693 (1994-01-01), Nakuma
patent: 5314574 (1994-05-01), Core et al.
patent: 5326726 (1994-07-01), Tsang et al.
patent: 5364493 (1994-11-01), Chau et al.
patent: 5411630 (1995-05-01), Nagase et al.
Webster's 3rd New International Dictionary, English, unabridged P. B. Gove, ed., Gec. Mernam Comp., Springfield, Mass. p. 664.
Microfabrication of Molecular Scale Microstructures, Deckman et al., 1987 American Institute of Physics, pp. 504-506 Appl. Phys Lett. 50(9) 2 Mar. 1987.
Molecular Confinement in Nanometer-Size Superlattice Microstructures Roxlo et al. 1986 The Amer. Phys. Society pp. 2462-2465 Phys. Rev. Lett., vol. 57, #19 10 Nov. 1986.
Analog Devices Inc.
Padgett Marianne
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