Dielectrically isolated integrated circuit structure

Details Dielectrically isolated integrated circuit structure Dielectrically isolated integrated circuit structure

1977-10-03

1990-04-10

Larkins, William D.

357 55, H01L 2704

Patent

active

049165135

ABSTRACT:
An integrated circuit structure is made up of laterally spaced islands separated from each other by closed annular grooves of an electrically isolating matter which can be either ambient air or vacuum, or an oxide formed from the adjacent semiconductor material.

REFERENCES:
patent: Re28653 (1975-12-01), Murphy
patent: 3354360 (1967-11-01), Campagna et al.
patent: 3386865 (1968-06-01), Doo
patent: 3430109 (1969-02-01), Li
patent: 3534234 (1970-10-01), Clevenger
patent: 3586542 (1971-06-01), MacRae
patent: 3598664 (1971-08-01), Kilby
patent: 3648125 (1972-03-01), Peltzer
Sanders et al, IEEE IEDM, Technical Digest, Dec. 1973, pp. 38-40.

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