Diaphragm pressure sensor including anti-stock protection means

Measuring and testing – Fluid pressure gauge – With protective separator

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73155, G01L 906

Patent

active

055093124

ABSTRACT:
A pressure sensor (20) comprises a deformable diaphragm (22) which closes a fluid passage (18) in sealed manner. In order to protect the diaphragm (22) from shocks, the passage includes a restriction (44) whose dimensions are so designed as to limit the pressure peak applied to the diaphragm to a cutoff value which the diaphragm can withstand. The restriction (44) may be formed in a detachable capillary tube (42) or it may be in the form of grooves in a small silicon plate integrated in the active portion of the sensor.

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