Continuous vacuum processing apparatus

Details Continuous vacuum processing apparatus Continuous vacuum processing apparatus

1988-06-03

1991-05-21

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Running length work

118719, 118733, 414217, 242190, C23C 1456

Patent

active

050165615

ABSTRACT:
A continuous vacuum processing apparatus including a slit-type sealing portion and a guide roller for guiding an object to be processed. The guide roller is provided at each of the two sides of the sealing portion or at one side thereof. Tension is applied to the object to be processed by another device provided between the guide rollers while the object is being conveyed, so as to enable it to be processed without being damaged.

REFERENCES:
patent: 3606201 (1971-09-01), Petusky
patent: 3665270 (1972-05-01), Ayers
patent: 3787690 (1974-01-01), Neff
patent: 3829038 (1974-08-01), Studer
patent: 4480585 (1984-11-01), Gattuso
patent: 4492181 (1985-01-01), Ovshinsky
patent: 4841908 (1989-06-01), Jacobson

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