Vertical XY stage

Details Vertical XY stage Vertical XY stage

1992-03-19

1993-08-31

Dzierzynski, Paul M.

Radiant energy

Supported for nonsignalling objects of irradiation

25044211, 248178, G01N 2100

Patent

active

052411834

ABSTRACT:
A vertical XY stage includes a base, an X-axis slider, a Y-axis slider, and a stage. The X-axis slider is movably mounted on the base. The Y-axis slider is movably mounted on the X-axis slider. Workpieces are arranged on the stage. The Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing the Y-axis slider to move in a Y-axis direction. The stage is arranged in a space surrounded by the slider main body and the vertical portion of the Y-axis slider. The stage can be pivoted through a shaft mounted on the Y-axis slider.

REFERENCES:
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4627009 (1986-12-01), Holmes et al.
Kanai et al., "An Elastic Fine Positioning Mechanism Applied To Contactless X-Y Table", Bull. Japan Soc. of Prec. Engg., vol. 17, No. 4 (1983), pp. 265-266.
Ishihara et al., "A Verical Stepper For Synchrotron X-Ray Lithography", J. Vac. Sci. Techol. B7(6), Nov./Dec. 1989, pp. 1652-1656.
Koga et al., "High-Performance Synchrotron Orbital Radiation X-Ray Stepper", J. Vac. Sci. Techol. B8(6), Nov./Dec. 1990, pp. 1633-1637.
Ishihara et al., "A Vertical X-Ray Stepper For SOR Lithography", Seimitsukougakukaishi 57/3/1991, (JPSE-57-03 '91-03-459), pp. 61-68.
Ishihara et al., "SOR X-Ray Stepper", NTT R & D vol. 39 No. 4 1990, pp. 581-590.

Affiliated with

Also associated with

Rating

Vertical XY stage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vertical XY stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vertical XY stage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2299570