Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1984-02-24
1986-01-21
Downey, Mary F.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430 23, 430320, 430323, 430394, 156640, 1566611, 445 47, G03F 900, B41C 100
Patent
active
045657556
ABSTRACT:
A method of manufacturing a shadow mask comprises the steps of: forming photoresist films on two major surfaces of a sheet made of a shadow mask material; forming latent images by selectively exposing the photoresist films, respectively; developing the latent images to form photoresist film patterns, respectively; and spraying an etching solution for etching the shadow mask sheet having the photoresist film patterns onto the two major surfaces thereof to etch bared portions of the shadow mask sheet, wherein the photoresist film formed on one of the two major surfaces of the shadow mask sheet is thicker than that formed on the other of the two major surfaces. The step of spraying the etching solution comprises a first step and a subsequent second step, wherein an impact of the etching solution against the shadow mask sheet in the first step is greater than that in the second step.
REFERENCES:
patent: 2762149 (1956-09-01), Mears
patent: 3666462 (1972-05-01), Kaplan
patent: 3676914 (1972-07-01), Fiore
Ohtake Yasuhisa
Tanaka Hiroshi
Dees Jos,e G.
Downey Mary F.
Tokyo Shibaura Denki Kabushiki Kaisha
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