Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction
Patent
1991-07-29
1993-08-31
Kunemund, Robert
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Including specific material of construction
422106, 156601, 1566171, 1566181, C30B 1520
Patent
active
052406849
ABSTRACT:
A device for measuring the diameter of the growing portions of the single crystals grown by the Czochralski technique is provided. This device is capable of measuring the crystal diameter with a high degree of accuracy over a wide range from the small-diameter portion thereof to the large diameter portion. A one-dimensional camera 28 and a two-dimensional camera 48 are fixed to a shoulder chamber 34 in such a manner that the optical axes thereof are parallel to each other. An optical path switch-over device, consisting of a cylinder 56, a movable plane mirror 52 mounted on a cylinder rod, and a fixed plane mirror 54, is provided. When the diameter of a neck portion of the single crystal 20 having a diameter of 10 mm or less is measured, the light reflected by the plane mirrors 52 and 54 is made incident on the two-dimensional camera 48, and the diameter of a bright ring 27 is measured on the basis of the image obtained by the two-dimensional camera. To measure the diameter of the conical and cylindrical portions 24 and 26 having a diameter of 10 mm or more, an image of a line lying across the bright ring 27 is obtained by the one-dimensional camera 28 by retracting the plane mirror 52, and the diameter of the bright ring 27 is measured.
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Baba Masahiko
Ibe Hiroyuki
Kunemund Robert
Shin-Etsu Handotai Company Limited
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