Method of making semiconductor memory device having a double sta

Details Method of making semiconductor memory device having a double sta Method of making semiconductor memory device having a double sta

1991-07-08

1992-11-10

Thomas, Tom

Fishing, trapping, and vermin destroying

437 47, 437 48, 437 60, 437191, 437233, 437919, H01L 2170

Patent

active

051622491

ABSTRACT:
A method for manufacturing a semiconductor memory device and the resulting device, wherein the MOSFET is electrically connected to the double stacked capacitor through a contact hole which comprises:

REFERENCES:
patent: 4855801 (1989-08-01), Kuesters
patent: 4953126 (1990-08-01), Ema
patent: 4977102 (1990-12-01), Ema
patent: 4994893 (1991-02-01), Ozaki et al.
patent: 5061651 (1991-10-01), Ino

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