Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1991-09-20
1993-08-31
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
338 46, G01P 1512
Patent
active
052398706
ABSTRACT:
A semiconductor acceleration sensor with a reduced cross axial sensitivity, which is easily manufacturable. In this semiconductor acceleration sensor, two sensor units are provided on two cantilever beams which have the identical shape and are arranged on the same plane in mutually opposite orientations, and a bridge circuit is formed by the piezoresistors of these two sensor units, such that the cross axial sensitivity of the semiconductor acceleration sensor can be reduced significantly. The bridge circuit to be formed can be a half bridge circuit, or a full bridge circuit in which case the piezoresistors of the second sensor unit are arranged to be oriented along a direction perpendicular to that along which the piezoresistors of the first sensor unit are arranged to be oriented. This semiconductor acceleration sensor can be manufactured monolithically on a single semiconductor substrate, or from separately manufactured acceleration sensors.
REFERENCES:
patent: 4306456 (1981-12-01), Maerfeld
patent: 4430895 (1984-02-01), Colton
patent: 4891984 (1990-01-01), Fujii et al.
Chapman John E.
Nissan Motor Co,. Ltd.
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