Method of manufacturing micro-tip for detecting tunneling curren

Details Method of manufacturing micro-tip for detecting tunneling curren Method of manufacturing micro-tip for detecting tunneling curren

1996-09-13

1999-07-13

Swann, Tod R.

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Electrical modification or sensing of storage medium

250306, 437228, G11B 900, G02B 2100

Patent

active

059236370

ABSTRACT:
A micro-tip for detecting tunneling current, micro force or magnetic force is manufactured as follows. A recess portion is formed on the surface of a first substrate. A peeling layer are formed on the substrate including the recess of the first substrate. A micro-tip is formed on the peeling layer of the first substrate. A joining layer is formed on a second substrate. The micro-tip on the peeling layer including the recess in the first substrate is transferred onto the joining layer on the second substrate. The peeling layer mainly consists of an oxide or a nitride, of a metal element, a semi-metal element or a semiconductor element.

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"Magnetic Micro-Actuator", K. Yanagisawa et al., Proceedings of the Workshop on Micro Electro Mechnical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, Nara, Jp., Jan. 30-Feb. 2, 1991, No. Workshop 4, Jan. 30, 1991, IEEE, pp. 120-124.

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