Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1984-08-21
1986-06-17
Niebling, John F.
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
118500, C23C 1500
Patent
active
045954810
ABSTRACT:
A carrier is provided to hold a disk while magnetic material is plated simultaneously on the two surfaces of the disk. The carrier contains a first opening substantially the same diameter as the disk and a second opening formed about a center line offset from the center line of the first opening so as to form a recess around a portion of the edge of the first opening. The recess allows the disk to be mounted into the carrier by placing the disk in a portion of the first opening and in a portion of the recess without having a surface of the disk touch the surface of the recess. The disk is then lowered into the first opening while leaving the remainder of the carrier material adjacent the recess to block the flow of plasma and impurities from one side of the disk to the other during the coating of the surfaces of the disk with magnetic media. A plug is provided for placement in the center hole of the disk. The plug is in two portions, one of which contains a spring means for flexibly holding the two halves together during the coating of the disk with magnetic media so that thermal expansion of the disk during coating does not result in the plug rattling or coming loose from the disk. The plug also serves as a knob or handle by which the disk can be handled, carried or mounted. A plurality of openings are provided in one carrier to allow both surfaces of a corresponding plurality of disks to be coated simultaneously with magnetic media.
REFERENCES:
patent: 4049523 (1977-09-01), Boehnke et al.
patent: 4141811 (1979-02-01), Yerkes et al.
patent: 4222839 (1980-09-01), Goodner et al.
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4424096 (1984-01-01), Kumagai
patent: 4473455 (1984-09-01), Dean et al.
patent: 4500407 (1985-02-01), Boys et al.
Allen Ronald
Chen Tu
Caserza Steven F.
Chapman Terryence
Komag, Inc.
MacDonald Thomas S.
MacPherson Alan H.
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