Polishing apparatus having a cloth cartridge

Details Polishing apparatus having a cloth cartridge Polishing apparatus having a cloth cartridge

1997-06-23

1999-07-13

Eley, Timothy V.

Abrading

Machine

Rotary tool

451289, 451494, B24B 500, B24B 2900

Patent

active

059218525

ABSTRACT:
A polishing apparatus such as a semiconductor wafer. The polishing apparatus has a turntable, a cloth cartridge detachably exchangeably mounted on the turntable, and a top ring for holding a workpiece and pressing the workpiece against the polishing cloth. The cloth cartridge includes a cartridge base member and a polishing cloth bonded to an upper surface of the cartridge base member. The cartridge base member comprises a plurality of base member segments, and the polishing cloth comprises a plurality of polishing cloth segments bonded to upper surfaces of respective of the base member segments.

REFERENCES:
patent: 3932966 (1976-01-01), Stern
patent: 4350497 (1982-09-01), Ogman
patent: 4527358 (1985-07-01), Day
patent: 4918872 (1990-04-01), Sato et al.
patent: 5400547 (1995-03-01), Tanaka et al.
patent: 5679064 (1997-10-01), Nishi et al.
patent: 5704827 (1998-01-01), Nishi et al.
U.S. Patent Application Serial No. 08/544,534, filed Oct. 18, 1995, Toyomi Nishi et al., entitled "Polishing Apparatus Including Cloth Cartridge Connected To Turntable", located in Group Art Unit 3203--Issue Fee Paid Feb. 14, 1997.

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