Novel diamond-like carbon film and process for the production th

Details Novel diamond-like carbon film and process for the production th Novel diamond-like carbon film and process for the production th

1988-10-14

1990-06-19

Silverman, Stanley

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

427 38, 427 451, B32B 900, B05D 306

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active

049353039

ABSTRACT:
A general-purpose novel diamond-like carbon film (DLC film) and its manufacture, and the DLC film is characterized by the following items (i) to (iv); (i) the film structure contains mainly diamond crystalline phases, and has a hydrogen content of 20 atomic %, the presence of diamond crystalline phases is confirmed by analysis by the electron diffraction method, and the diffraction peak appears at 2.theta.=43.9 by analysis by the X-ray diffraction method; (ii) the density is 1.8 g/cm.sup.3 or over; (iii) the film surface is smooth and excellent in etching resistance; and (iv) the film is chemically stable and structurally stable, and these stabilities are not deteriorated under high temperature conditions.

REFERENCES:
Kawarada et al., Japanese Journal of Applied Physics, vol. 26, No. 6, Jun. 1987, pp. 4032-4034.

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