Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

1996-05-16

1997-09-30

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Electrical

73721, 73727, G01L 904

Patent

active

056728263

ABSTRACT:
The present invention provides a semiconductor pressure sensor having a glass base and a metal base bonded together satisfactorily so that a silicon diaphragm may not be affected by residual strain, and an intelligent differential pressure and pressure transmitting device employing the semiconductor pressure sensor.
The semiconductor pressure sensor comprises a silicon diaphragm (1) provided with a strain-sensitive element, a glass or ceramic base (2) bonded to the silicon diaphragm (1), and a metal base (4) bonded to the glass or ceramic base (2) with a bonding glass (3). The thermal expansion coefficient of the metal base (4) at a temperature corresponding to the strain point of the bonding glass (3) is not greater than that of the glass or ceramic base (2).

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patent: 5454270 (1995-10-01), Brown et al.
patent: 5554809 (1996-09-01), Tobita et al.

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