Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1993-02-01
1995-03-28
Hille, Rolf
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356360, G01B 1124, G01B 902
Patent
active
054022347
ABSTRACT:
A method of profiling a rough surface of an object includes the steps of producing an interference pattern of the object surface using an interferometer to produce an illumination intensity on the pixels of an imaging device, varying the optical path difference between the object surface and a reference surface of the interferometer through a range including a position of zero optical path difference for each pixel, calculating values of an interference discriminator function to identify the regions of coherence, gathering at the imaging device and storing for each pixel a plurality of intensity values about the region of coherence--as identified by the state or value of the interference discriminator function calculations--at consecutive data points spaced along the range by a predetermined phase difference, storing for each pixel the relative position of the plurality of intensity values along the range, and calculating from the stored intensity values the difference in height between two selected pixels using methods known in the art. An apparatus for practicing the invention is also disclosed.
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Creath, "Step Height Measurement Using Two-Wavelength Phase Shifting Interferometry", Applied Optic, vol. 25, No. 14, Jul. 15, 1987.
Hille Rolf
Tran Minhloan
Zygo Corporation
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