Flow dividing structure of mass flow controller

Details Flow dividing structure of mass flow controller Flow dividing structure of mass flow controller

1991-02-22

1992-03-31

Hepperle, Stephen M.

Fluid handling

Systems

Dividing into parallel flow paths with recombining

73202, 138 40, 251115, G01F 500

Patent

active

050998811

ABSTRACT:
A flow dividing structure for a mass flow controller includes a base having a main passage which includes an upsream circular passage, a downstream circular passage, and a tapering circular passage which connects the upstream and downstream circular passages. A plug inserted in the main passage includes a first cylindrical portion, a second cylindrical portion and a tapering frustoconical portion. A first annular passage is defined between the first cylindrical portion and the inner circumferential surface of the upstream circular passage. A second annular passage is defined between the second cylindrical portion and the inner circumferential surface of the downstream circular passage. A tapering annular passage is defined between the tapering frustoconical portion and the inner circumferential surface of the tapering circular passage. A flow measuring passage bypasses the tapering circular passage and connects the upstream circular passage with the downstream circular passage.

REFERENCES:
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patent: 3107689 (1963-10-01), Schreiber et al.
patent: 3443417 (1969-05-01), Meyer
patent: 4524616 (1985-06-01), Drexel et al.
patent: 4886086 (1989-12-01), Etchells et al.

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