Gas tube with heating apparatus

Details Gas tube with heating apparatus Gas tube with heating apparatus

1999-02-25

2000-10-10

Beck, Shrive

Coating apparatus

Gas or vapor deposition

137340, 392478, 165 802, C23C 1000, C23C 16455, F17D 104, F28C 114

Patent

active

061290432

ABSTRACT:
A gas tube with heating apparatus. The gas tube is applicable in a chemical vapor deposition machine. The gas comprises a gas circulating tube and a coaxial gas tube invaginating a gas transporting tube therein. A heater is installed in the gas circulating tube, while the coaxial tube is covered by a thermal insulating layer. In addition, a control valve, a pressure gauge, and a particle trap are installed in a gas supplying tube connecting with the gas circulating tube.

REFERENCES:
patent: 5343937 (1994-09-01), Gross
patent: 5362328 (1994-11-01), Gardiner et al.

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