Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-01-21
1999-04-20
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350416, G01P 344
Patent
active
058958525
ABSTRACT:
In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator 26 is disposed to the respective support portions 24 fixed on a substrate 22 through support beams 25 and a columnar electrode 33 is disposed in the oscillator 26 by being fixed to the substrate 22 . X-axis displacement sensing units 31, 31 are formed on the right and left sides of the oscillator 26 and Y-axis displacement sensing units 32, 32 are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator 26 and the columnar electrode 33, an electrostatic attracting force is generated therebetween and the oscillator 26 is oscillated in a Z-axis direction. When an angular velocity .OMEGA.Y is imposed about the Y-axis at this time, the oscillator 26 is displaced to the X-axis by a Coriolis force and the displacement can be sensed by the X-axis displacement sensing units 31, whereas when an angular velocity .OMEGA.X is imposed about the X-axis, the oscillator 26 is displaced to the Y-axis by a Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units 32, so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.
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patent: 5734105 (1998-03-01), Mizukoshi
Hasegawa Tomoyasu
Moriya Kazufumi
Osawa Tetsuo
Shibano Tomio
Takata Eiichi
Moller Richard A.
Murata Manufacturing Co. Ltd.
Williams Hezron E.
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