Scanning exposure apparatus having a scanning device for scannin

Details Scanning exposure apparatus having a scanning device for scannin Scanning exposure apparatus having a scanning device for scannin

1995-06-05

1996-06-18

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250548, 356400, H01J 314

Patent

active

055280277

ABSTRACT:
A scanning exposure apparatus according to the present invention comprises a reticle stage for continuously moving a reticle and a wafer stage for moving a wafer in synchronization with the movement of reticle. A light supply system emits light beams for detecting a relative positional relation between the reticle stage and the wafer stage toward the reticle. On this occasion the emitted light beams are scanned to follow the moving reticle stage, using for example a galvanometer scanner.

REFERENCES:
patent: 4822975 (1989-04-01), Toriqoe
patent: 5194893 (1993-03-01), Nishi

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