Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-11-26
1994-04-19
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324719, G01R 3126
Patent
active
053049250
ABSTRACT:
A test circuit for evaluating the characteristics of an component formed on the surface of a semi-conductor substrate. The test circuit comprises at least two MOS field effect transistors having the same gate width and different gate lengths, and measuring electrodes mounted on opposite ends of each gate and enageable with probes when measuring the test circuit. The test circuit measures typical characteristic data of MOSFETs to be used in a semiconductor device with good match by an electrical means.
REFERENCES:
patent: 4144493 (1979-03-01), Lee et al.
patent: 4542340 (1985-09-01), Chakravarti et al.
patent: 4896108 (1990-01-01), Lynch et al.
patent: 4994736 (1991-02-01), Davis et al.
Karlsen Ernest F.
Seiko Epson Corporation
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