Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1979-04-16

1980-12-23

Dixon, Harold A.

Radiant energy

Luminophor irradiation

250311, 250492B, H01J 938

Patent

active

042412595

ABSTRACT:
A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample chamber, and the sample holder or its base form a cover for the sample chamber permitting simple and troublefree contact with the sample. Use of the electron microscope for the testing of integrated circuits is disclosed.

REFERENCES:
patent: 2356963 (1944-08-01), Young
patent: 2472316 (1949-06-01), Rennie
patent: 3766427 (1973-10-01), Coates et al.
patent: 3784815 (1974-01-01), Coates
patent: 3790155 (1974-02-01), Longamore

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