Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent
1980-07-31
1983-05-31
Punter, William H.
Optics: measuring and testing
By alignment in lateral direction
With light detector
356363, G01B 1100
Patent
active
043858392
ABSTRACT:
An electro-optical device for generating data signals representing relative displacement between a master reticle with an optical aperture pattern in an object plane and a workpiece with an image of the aperture pattern in an image plane comprises a reference detector for sensing reference radiation directed towards the aperture pattern and a convolution detector for sensing the reference radiation reflected by the image pattern. A processor compares the phase of a signal generated by the convolution detector to the phase of a signal generated by the reference detector and generates the data signals defining the relative displacement between the master and the workpiece.
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Baird Corporation
Punter William H.
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