Solid state image sensor

Details Solid state image sensor Solid state image sensor

1988-10-04

1989-08-29

Edlow, Martin H.

357 237, 357 41, 357 42, H01L 2714

Patent

active

048622370

ABSTRACT:
A solid state image sensor including a plurality of sensing cells, each formed of a switching transistor and a thin film sensing device, arranged in a line or a matrix. The switching transistor is a thin film transistor (TFT) of polycrystalline silicon and the thin film sensing device utilizes a layer of amorphous silicon formed on a lower electrode which is electrically connected to the drain of the switching.

REFERENCES:
patent: 3191061 (1965-06-01), Weimer
patent: 3339075 (1967-08-01), Szepesi
patent: 4223330 (1980-09-01), Koike
patent: 4323912 (1982-04-01), Koike et al.
patent: 4472821 (1984-09-01), Mazin

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