Family of compounds crosslinkable by photon irradiation

Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy

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20415918, 20415924, 525329, 525337, 525340, 525360, 525370, 526256, C08F 800, C08F 834, C08J 324

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active

042591627

ABSTRACT:
A family of negative resins, capable of undergoing crosslinking under the effect of more or less energetic photons (gamma radiation, X-rays, ultraviolet or visible light), applicable to the protection of objects against atmospheric agents and to the production of masks of the type used in the production of integrated circuits. The typical compound according to the invention contains at least one substance of which the chemical formula comprises a thiirane ring: ##STR1## such as 2,3-epithiopropyl methacrylate copolymerized with a vinyl monomer, such as methyl methacrylate. Crosslinking is facilitated by photoinitiators, such as aryl diazonium and aryl iodonium salts liberating Lewis acids. By selecting the photoinitiator, it is possible to act on the spectral region where irradiation is effective.

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patent: 3404158 (1968-10-01), Yu
patent: 3708296 (1973-01-01), Schlesinger
patent: 3997344 (1976-12-01), Irwin et al.
patent: 3997344 (1976-12-01), Schlesinger et al.
patent: 4091194 (1978-05-01), Schlesinger
patent: 4130424 (1978-12-01), Feit et al.
Journal of Pol. Science, Part A, vol. 3, Jul. 1965, p. 2701.

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