Method and apparatus for operating one or more deposition system

Details Method and apparatus for operating one or more deposition system Method and apparatus for operating one or more deposition system

1986-04-07

1988-04-05

Fleming, Michael R.

Boots, shoes, and leggings

364131, 364138, 364496, 427 10, 118695, 118697, 118698, 118712, C23C 1302, C23C 1840

Patent

active

047363045

ABSTRACT:
There are disclosed a method and apparatus for improved operation of one or more deposition systems. A minimum expenditure malfunction recovery system provides for a variable recovery related to the current hardware and actual states of the system. A simplified input and output (I/O) device is provided to control the data flow in the system without addressing and decoding complexity. A flexible operation system is also provided for a plurality of deposition systems whose operation easily can be varied without reprogramming of the operating sequence.

REFERENCES:
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patent: 4331702 (1982-05-01), Hieber et al.
patent: 4430959 (1984-02-01), Ebata et al.
patent: 4550366 (1985-10-01), Toyama et al.
patent: 4550375 (1985-10-01), Sato et al.
patent: 4580207 (1986-04-01), Arai et al.
patent: 4608661 (1986-08-01), Sasaki
patent: 4623554 (1986-11-01), Kaschak et al.

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