Patent
1988-05-06
1989-08-29
Arnold, Bruce Y.
350487, 350631, G02B 2610
Patent
active
048611255
ABSTRACT:
An optical scanning device for flaw detection or the like having a suspension system including at least two pairs of flexure legs. A first pair has flexure legs diagonally crossed in spaced-apart relation and fixed at one end to a stationary body and at an opposite end to a vibratory body. A second pair of spaced-apart cross-flexure legs link the stationary base to a magnetic driver for varying the angular position of the vibratory body about an axis of rotation. Each of the four flexure legs has a radial stiffness exceeding a torsional stiffness. The first pair of cross-flexure legs and the supported mass have characteristics corresponding to the characteristics of the second pair of cross-flexure legs and associated mass, thereby providing identical resonant frequencies of distortional bending. Any torque exerted on the stationary base by the first pair of cross-flexure legs is compensated by a torque which is equal in magnitude but opposite in direction translated through the second pair of flexure legs.
REFERENCES:
patent: 3932809 (1976-01-01), Frank
patent: 4025203 (1977-05-01), Lee
patent: 4316648 (1982-02-01), Lissack
patent: 4347530 (1982-08-01), Stetson
patent: 4708420 (1987-11-01), Liddiard
patent: 4732440 (1988-03-01), Gadhok
patent: 4802720 (1989-02-01), Paulsen
Arnold Bruce Y.
Kachmarik Ronald M.
Schneck Thomas
Tencor Instruments
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