Surface discharge radiation source

Details Surface discharge radiation source Surface discharge radiation source

1989-12-11

1992-06-02

Yusko, Donald J.

Electric lamp and discharge devices

With gas or vapor

Having particular electrode structure

313 36, 313632, 313634, 313635, H01J 1704

Patent

active

051189895

ABSTRACT:
A surface discharge excimer light source which employs a one sided cell wherein all electrodes and the dielectric are on one side of the discharge space. The light produced by the device is neither shadowed nor attenuated by an electrode, and the electrode temperatures can be closely controlled. The construction of the device eliminates the need to maintain parallelism of the discharge space and close tolerances.

REFERENCES:
patent: 2943223 (1960-06-01), Fay
patent: 3925703 (1975-12-01), Schermerhorn
patent: 4837484 (1989-06-01), Eliasson et al.
patent: 4945290 (1990-07-01), Eliasson et al.

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